Name: Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems
Author: IEEE International Conference on Micro Electro Mechanical Systems (13th 2000 Miyazaki, Japan)

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Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems

IEEE International Conference on Micro Electro Mechanical Systems (13th 2000 Miyazaki, Japan)

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